Pecvd Graphite Boats Graphite Boat Used in Pecvd of Solar Cell Production Line

• Type: Pecvd Graphite Boats
• Composition: Carbon
• Carbon Content: High-Carbon
• Grade: High Quality
• Forming Way: Isostatic Graphite
• Crystal Morphology: Compact Crystalline Graphite
• Model NO.: TKSMZ001
• Bulk Density: 1.87 g/cm3
• Shore Hardness: 70
• Flexural Strength: 70 MPa
• Grain Size: 10 μm
• Transport Package: Standard Export Packing
• Specification: customized
• Origin: China
• Production Capacity: 500 Pieces/Month

Product Description

Graphite boat used in PECVD of solar cell production line
The production of solar cells requires six major processes: texturing, diffusion, etching, coating, screen printing and sintering. In the manufacturing of solar cells, the PECVD tube coating process uses a graphite boat as the working body. The coating process uses plasma enhanced chemical vapor deposition to deposit a silicon nitride film on the front of the silicon wafer to reduce sunlight reflection and the surface of the silicon wafer.
PECVD is one of a critical process of solar cell production . It'll direct impact on the cells coating uniformity, color and appearance of the finished product. The graphite boat made of high quality raw material. High mechanical strength and high purity coupled with a dense material structure that allows only minimum erosion by plasma are the key requirements. Normally the graphite carrier can be supplied with a high level of surface finish, flatness or a defined surface roughness.

Graphite boat core technology

The secondary purification process improves the purity of the material. Under long-term working conditions, the resistivity of each point of the graphite boat still maintains excellent uniformity, ensuring uniform current, reducing the color difference of the coating, at the same time, effectively slowing down the oxidation of the graphite boat, and eventually improving the service life. 


The C-coating process gives the surface of the boat plates perfect flatness and smoothness, enlarging the contact area between the graphite plates and the silicon wafers, therefore increasing the times of use and eventually prolonging the service life of the entire graphite boat.




Safe Packing