High Quality Graphite for Ion Implantation in Semiconductor Manufacturing

• Type: Graphite Mold
• Composition: Carbon
• Carbon Content: High-Carbon
• Grade: Industrial Grade
• Forming Way: Isostatic Graphite
• Crystal Morphology: Compact Crystalline Graphite
• Model NO.: TJLZZR002
• Bulk Density: 1.8g/cm3-1.85g/cm3
• Application: Ion Implantation
• Flexural Strength: No Less Than 45 MPa
• Compressive Stregnth: No Less Than 60 MPa
• Purity: High
• Transport Package: Carton, Plywood Case or as Customers′ Requirement.
• Specification: can be customized
• Origin: China
• HS Code: 6815190090
• Production Capacity: 500000 PCS/Month

Product Description

Graphite products play an indispensable role in many semiconductor production processes, such as: single crystal growth, ion implantation or plasma etching process, LED chip production process. These processes need to be operated in high temperature and highly corrosive environment, and graphite products are required to have high purity and absolute accuracy. The heating system of Czochralski single crystal furnace uses a large number of graphite materials, and graphite products are also used as auxiliary tools and components in semiconductor wafer processing (including zone melting, epitaxy and shape processing); Graphite is also an indispensable material in the production of polysilicon materials for semiconductor silicon wafers.
 

Ion implantation is a complex and sensitive process and is used in the manufacture of semiconductors. For successful operation, beam purity and process stability are important. Here, graphite parts play a critical role. On the whole, the total cost of maintaining the system can be reduced when conventional materials are substituted with higher quality materials and process specific alloys.

Graphite is mainly utilized in ion implanter beamlines. The thermal, chemical, electrical, and mechanical properties of these materials are essential in improving the service life of the system.

We use purified specialty graphite with ultra-fine particle size to produce graphite components for Ion implantation.



Any size and shape can be customized. We can produce accordign to drawing from cusotomers. 





Safe Packing: 

Wide Application of Graphite: