Graphite Components Graphite Disk for CVD Systems

• Type: Graphite Crucible
• Composition: Carbon
• Carbon Content: High-Carbon
• Grade: Industrial Grade
• Forming Way: Isostatic Graphite
• Crystal Morphology: Compact Crystalline Graphite
• Model NO.: TJDP001
• Bulk Density: 1.8g/cm3-1.85g/cm3
• Application: CVD Coating System
• Flexural Strength: No Less Than 45 MPa
• Compressive Stregnth: No Less Than 60 MPa
• Purity: High
• Transport Package: Carton, Plywood Case or as Customers′ Requirement.
• Specification: can be customized
• Origin: China
• Production Capacity: 500000 PCS/Month

Product Description

Graphite components for PVD and CVD coating

Graphite and components made of graphite are utilized at creating thin layers of TiC and TiN by means of PVD and CVD processes.
Due to high thermal, chemical and mechanical resistance of graphite, the following items are utilized at the abovementioned processes.

What is CVD?

CVD stands for "chemical vapor deposition". This is an effective process for coating components via a thermally induced chemical reaction.

Advantages of CVD

CVD coatings offer outstanding adhesion, even under extreme operating conditions. This results in homogeneous components without weak spots. Create a technical edge with a CVD coating and improve the quality of your products. We produce high-quality, customized components made in graphite, CFC an insulation mateirals  for your coating system.

What graphite products we are producing for CVD

Graphite rings


graphite disks with pyramids

 graphite flanges

graphite lower tube, etc. 

Graphite Materials Specifications:
    

Molded Graphite
Property	FT-G4	FT-G5	Unit
Apparent Density	≥1.78	≥1.85	g/cm^3
Ash value	≤500	≤500	ppm
Shore Hardness	≥40	≥45	HSD
Specific Electrical Resistivity	≤12	≤10	μΩm
Flexural Strength	≥35	≥40	Mpa
Compressive Strength	≥60	≥70	Mpa
Max Grain Size	≤43	≤43	μm
Thermal Expansion (room temperature to 600ºC)	≤4.5	≤4.4	10-6/ºC

 

Isostatic graphite
Property	FT-D5	FT-D6	FT-D7	FT-G8	Unit
Apparent Density	≥1.85	≥90	≥1.81	≥90	g/cm^3
Max Grain Size	≤20	≤20	≤20	≤20	µm
Ash value	≤500	≤500	≤500	≤500	ppm
Specific Electrical Resistivity	≤12	≤15	≤15	≤15	μΩm
Flexural Strength	≥48	≥55	≥48	≥55	Mpa
Compressive Strength	≥85	≥95	≥115	≥135	Mpa
Shore Hardness	≥48	≤53	≥68	≥70	HSD
Thermal Expansion (room temperature to 600ºC)	≤4.8	≤45.5	≤5.7	≤5.85	10-6/ºC

Any size and shape can be customized. We can produce accordign to drawing from cusotomers. 





Safe Packing: 

Wide Application of Graphite: